Please use “Ctrl” and “F” keyboard
to search the Part below with the Part Number.
| DESCRIPTION | PART No. |
| SHIELD DEPO 85-2 | 1D10-303124-14 |
| SHIELD DEPO 85-2 | ID10-303124-21 |
| UPPER ELECTRODE | 1D10-100670-13 |
| BAFFLE PLATE | 1D10-101398-12 |
| SHIELD DEPO 85-2 | 1D10-303124-21 |
| TEL BOTTOM ELECTRODE 6" | 1810-120695-12 |
| UPPER COOLING PLATE | 1810-221584-12 |
| UPPER COOLING PLATE | 1810-221024-14 |
| COOLING PLATE | 1810-224912-11 |
| COOLING PLATE | 282183Y91211 |
| FOCUS RING 8" | 1D10-302209-15 |
| WINDOW PLATE(DEPO SHILD) | 1D10-309697-11 |
| WINDOW PLATE(DEPO SHILD) | 3D10-302734-12 |
| APC BUTTERFLY PLATE | 1D80-000760-11 |
| SUPPORT SHILD DEPO CE-Y | 1D10-308540-12 |
| UPPER ELECTRODE | 1A10-203552-11 |
| PLATE EXHAUST SE | 3D10-100845-11 |
| RING,BTM SHIELD SE | 3D10-100844-11 |
| SHIELD DEPO | 3D10-101194-12 |
| SHIELD PLATE | 3D10-101187-13 |
| SHUTTER BTM TYPE SE | 3D10-101152-13 |
| UPPER ELECTRODE | 1D10-201588-12 |
| UPPER ELECTRODE | KF8E-3782-016A0 |
| BAFFLE A 8K | 810-424110-2 |
| COVER UPPER ELECTRODE I | KF82-3782-036A0 |
| RING SHIELD | 1D10-200733-11 |
| UPPER ELECTRODE | 1D10-201429-15 |
| WINDOW PORT | 32005S-42713 |
| BAFFLE PLATE | 72011T-85414 |
| TAPER BAFFLE PLATE | 1D10-101475-11 |
| UPPER ELECTRODE | 1D10-202204-12 |
| UPPER ELECTRODE | 1D10-202177-12 |
| EXHAUST PLATE (LEFT,RIGHT) | 1810-325571-14 1810-325572-14 |
| EXHAUST PLATE (UP) | 1810-325569-13 |
| VIEW PORT | 1805-22008-11 |
| BOTTOM COVER | 1810-223352-11 |
| EXHAUST SLIT | 1810-223289-13 |
Contact us (sales@da-semi.com)
for the availability and more info.